|Category||Sensors => Flow Sensors => 8829729|
|Title||Flow Sensors Digital Flow sensor +/-30 lpm Air|
MEMSIC MFC2000 Digital MEMS Gas Flow Sensor, based on MEMSIC's proprietary CMOS technology for thermal mass flow sensing, can measure up to 70 SLM bi-directional flow rate with ±3.0% accuracy. The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability. The MEMSIC MFC2000 module has <5mA operating power consumption and <100µA power consumption sleep mode for optimal power management in portable applications. The MFC2000 series is externally powered, up to 5.5V (3.3V typ.). I2C digital output is standard.
|Datasheet||Download MFC2030BP1N1 datasheet
|Product Category||Flow Sensors|
|Output Voltage||2.7 V to 3 V|
|Operating Supply Voltage||2.7 V to 5.5 V|
|Connection Method||8 Pin Connector|
|Output Type||Analog, Digital|
|Supply Voltage - Max||5.5 V|
|Supply Voltage - Min||2.7 V|
|Type||MEMS Mass Flow Sensor|
|High Performance Bi-Directional Digital MEMS Gas Flow Sensor
FEATURES Bi-directional flow or ±70SLM) High dynamic range ±3% m.v. accuracy ±0.8% m.v. repeatability Low power consumption Fast response time Single - 5.5Vdc power supply Digital I2C and analog outputs Standard push-in fitting sizes Custom fluid connector available Temperature compensated Highly configurable firmware Easy-to-use PC-based GUI RoHS and WEEE compliant APPLICATIONS
Medical gas flow measurement and control Industrial gas flow measurement and control Consumer products
± 30 SLM version. externally powered, 5.5V (3.3V typ.). I2C digital output is standard. Other output available upon request. The MFC2000 series includes firmware that is highly configurable, offering the user a variety of settings that can be tailored to specific applications. This includes data output type, calibration settings, measurement modes, and power consumption. A user-friendly PCbased application offers the user a variety of data collection options, including real-time graphical display. Mechanically, the unit includes fittings that can accept a variety of standard inlet tube sizes. MFC2000 series is a true thermal mass flow sensing module, and can easily be configured to suit a variety of applications, from medical flow to industrial processing. Customized versions, including customer specific bulk channel and mounting options are available. For more information, please contact MEMSIC at email@example.com.DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on MEMSIC's proprietary CMOS technology for thermal mass flow sensing. It can measure to 70 SLM bi-directional flow rate with +/3.0% accuracy. The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability. The module has very low operating power consumption 5 mA) and a low power consumption sleep mode (<100 µA) for optimal power management in portable applications. The MFC2000 series is
Information furnished by MEMSIC is believed to be accurate and reliable. However, no responsibility is assumed by MEMSIC for its use, or for any infringements of patents or other rights of third parties, which may result from its use. No license is granted by implication or otherwise under any patent or patent rights of MEMSIC.MEMSIC, Inc. One Technology Drive, Suite 325, Andover, MA 01810, USA Tel: Fax: www.memsic.com
(Measurements performed with air at 23C temperature, 1 Atm pressure, 50% RH, 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: C, 1013mbar.
Parameter Measurement Range Flow Direction Supply DC Voltage (VDD) Interface Voltage1 (VDDIO) Output Range Operating Temperature Calibrated Temperature Storage Temperature Relative Humidity Supply Current3 Accuracy4
RMS Noise at Zero Flow Offset Shift w/Temp. Total Error Band4 Pressure Drop Sample Rate Orientation Sensitivity Wake Time Working Pressure Module Weight Wetted Material
LSB Vdc C non-condensing % Operating mode mA Sleep mode Q < Qmax % m.v. 0.01Qmax % F.S. 0.1Qmax Q Qmax % m.v. ODR 0.1Qmax % F.S. 0.1Qmax Q Qmax % m.v. ODR 0.1Qmax % F.S. ODR = 100Hz sccm ODR = 10Hz sccm - 50C SCCM/C % m.v. 0.1Qmax Q Qmax 4 18 mbar 10 msec < 60 sccm Wake up from sleep mode 40 msec 0-8 Bar Includes aluminum inserts 100 g Si, SiO2, Si3N4, Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber, Aluminum alloy 3003, Epoxy, Silicone
Note 1: VDDIO is generated internally and should be used to set the logic high voltage for I2C interface. VDDIO can supply a current to 100 mA. Note 2: Use two's complement as binary signed number representation. Note 3: Power consumption can be optimized using "Power-Cycle" configuration to program the wake and sleep duration. Note 4: Accuracy is defined as the sum of all dc errors (linearity) at 23C. Error Band is defined as the sum of accuracy and offset/span due to temperature. Both are measured after factory calibration, using internal averaging (100x) to eliminate errors due to noise. If the end application requires a high Output Data Rate (ODR), and cannot benefit from averaging, the total RMS error of any given measurement can be calculated by adding the repeatability specification. Note 5: Repeatability is defined as standard deviation divided by mean flow m.v.), or standard deviation divided by F.S. F.S.). Average/ODR is programmable. MEMSIC MFC2030 v1.05 Page of 5 CONFIDENTIAL
Supply Voltage (VDD)......................... to +5.5V Storage - 8 Bar Gauge Shock.......................................... 10g, 0.5ms Vibration.................................... 200 Hz ESD.................... 4kV/8kV (contact/air discharge).
Note: Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; the functional operation of the device at these or any other conditions above those indicated in the operational sections of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect the device's reliability.
The flow rate is detected by the MEMS thermal mass flow sensor. The sensor chip, produced in MEMSIC proprietary CMOS compatible technology, is composed of a central heater source (micro heater) and two temperature sensors (thermopiles), which are placed symmetrically upstream and downstream of the micro-heater. If no gas flows over the sensor surface, the symmetric thermopiles measure the same rise in temperature, resulting in the same output voltage of the two thermopiles. If a non-zero gas flows from the inlet to the outlet of the meter, the velocity of a fully-developed laminar air flow unbalances the temperature profile around the heater and heat is transferred from upstream thermopiles to the downstream thermopiles, causing a change in the voltages of the thermopiles. Larger gas flow rates result in larger asymmetry in the profile.
Description Power Supply I/O Voltage Reference Serial Clock Line for I2C bus Serial Data Line for I2C bus Connect to Ground Connect to Ground Connect to Ground PWM Analog Output (default) or Interrupt Output (data ready)
Line 1: The arrow sign of MEMSIC Logo denotes the positive direction of flow Line 2: Model name Line 3: Barcode (shown below as a space) Line 4: Lot number
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